M*-CNT-300
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Tilt Compensated 20 nm CarbonNanoTip
for High Aspect Ratio Applications.
Ordercode: CNT300_ArrowNCR_3
The nanotools® M*-CNT is not using a multiwall carbon
nanotube attached to a silicon cantilever. Moreover we pushed our proofen EBD
technology to the dimensions of a CNT, but maintaining EBD´s key strength:
precise tip orientation, precise control in tip dimensions (length and
diameter), large volume production.
What is critical in nanotube technology is
solved for the M*-CNT:
- controlled tip length
- controlled tip orientation (angle accurancy better
0.5deg)
- automated fabrication process
Tip Spec
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| Sketch Tip Spec |
| nominal | range | |
| Shape | cylindrical | |
| Tip length (l) | 300 nm | +/- 50 nm |
| Tip radius (r) | 2-3 nm | < 5 nm |
| Tip diameter (d) |
20 nm |
+/- 5 nm |
| Tilt compensation |
3 deg | +/- 0.5 deg |
| Pyramide height (PH) |
15 µm | 10-15 µm |
| Tip set back (TSB) |
5.2 µm | 4-5.5 µm |
Cantilever Spec
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| Sketch Cantilever Spec |
| nominal | range | |
| Type | ArrowNC | |
| Shape | beam | |
| Force Const. | 42 N/m | 27-80 N/m |
| Res. Frequency | 285 kHz | 240-380 kHz |
| Length (l) |
160 µm | 150-170 µm |
| Width (w) |
45 µm | 37.5-52.5 µm |
| Thickness (t) |
4.6 µm | 3.6-5.6 µm |
Coating
Tip side: none
Back side: 30 nm Al reflex
Certified Quality
We do a 100% SEM quality check for every tip (datasheet with precise tip dimensions provided). Every tip is handled in an ESD closed circle, clean room packed and vacuum sealed for shipment.
nanotools is the first and only probe manufacturer being quality certified to DIN EN ISO 9001.
EBD
The high aspect ratio part of the probe is made from
High Density, diamond linke carbon (HDC/DLC).
The tips show superior properties:
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high aspect ratio
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hydrophobic surface properties
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high stiffness / elastic modulus (8x of that of silicon)
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low thermal mass
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abrasion resistance
Our HDC dissipates static charge. This leads to probes offering the extreme durability of diamond together with high resolution imaging capability. Applying our patented EBD technique we ensure a stiff and rigid high aspect ratio probe of superior symmetry and nanometer precision.