EBD2-100
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Multipurpose High Aspect Ratio EBD probe
Ordercode: EBD2-100_NCH_13
The nanotools® EBD2-100_NCH_13 tip is designed for non-contact / high frequency mode, in
particular for automated AFM systems for in-line process control as well as
general purpose AFM.
Excellent lifetime and reliability for high aspect ratio applications are key features.
Tip Spec
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| Sketch Tip Spec |
| nominal | range | |
| Shape | conical | |
| Tip length (l) | 2000 nm | + 600 nm |
| Tip radius (r) | < 5 nm | < 10 nm |
| Tip diameter (d) measured at 1000 nm |
< 100 nm |
80-100 nm |
| Tilt compensation |
13 deg | +/- 1 deg |
| Pyramide height (PH) |
15 µm | 10-15 µm |
| Tip set back (TSB) |
15 µm | 5-25 µm |
Cantilever Spec
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| Sketch Cantilever Spec |
| nominal | range | |
| Type | TESP / NCH | |
| Shape | beam | |
| Force Const. | 42 N/m | 20-75 N/m |
| Res. Frequency | 320 kHz | 270-350 kHz |
| Length (l) |
125 µm | 115-135 µm |
| Width (w) |
30 µm | 22-38 µm |
| Thickness (t) |
4 µm | 3-5 µm |
Coating
Tip side: none
Back side: none
Certified Quality
We do a 100% SEM quality check for every tip (datasheet with precise tip dimensions provided). Every tip is handled in an ESD closed circle, clean room packed and vacuum sealed for shipment.
nanotools is the first and only probe manufacturer being quality certified to DIN EN ISO 9001.
Our M1 is used by leading fabs worldwide for several AFM in-line monitoring tasks such as depth control or STI.
EBD
The high aspect ratio part of the probe is made from High Density, diamond like carbon (HDC/DLC).
The tips show superior properties:
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high aspect ratio
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hydrophobic surface properties
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high stiffness / elastic modulus (8x of that of silicon)
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low thermal mass
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abrasion resistance
Our HDC dissipates static charge. This leads to probes offering the extreme durability of diamond together with high resolution imaging capability. Applying our patented EBD technique we ensure a stiff and rigid high aspect ratio probe of superior symmetry and nanometer precision.